Close

Back to the drawing board...

A project log for Vacuum System for Deposition

I have been putting a system together for the past few years to do different kinds of deposition.

jerry-biehlerJerry Biehler 08/21/2015 at 06:400 Comments

So, I have scrapped the idea of getting this supply running for the e-beam gun. Finding a tube has been very difficult so I picked up a Thermionics EBPS15, 15kw, tetrode electron beam power supply to do the job, it is good for up to 10kv at 1.5 amps. It uses a 4CX15000A tetrode for regulation. I got the power supply itself from a guy in Tennessee and the control box for it from BMI Surplus. Thermionics was able to supply me with a very complete manual so I should be able to get it going.

I do need to make the interconnecting cables and the filament transformer box. It contains the SCR controller for the filament transformer, the current sensor, and the filament transformer. Lucky for me the details of the operation of the unit are very complete and was able to figure out how to build it. I had a hall type current sensor from one of the old chassis that I picked up in california that will work for feed back and I can use the Airco filament transformer I picked up earlier. The controller uses the current sensor to detect emission current and then sends a 0-10v signal to the SSR module to control the power to the filament which limits emission. I picked up a Eurotheum 425A SCR controller off ebay which is rated for transformer coupled loads so I should have everything I need.

Using this supply instead of trying to roll my own gives me good regulation and also Arc Detect. During deposition you get arcing in the chamber, this power supply will detect that and roll back the current and recover automatically. The reason for the arcing is not very well understood, apparently.

The control box showed up today and the power supply was picked up by Yellow Freight today and is on it's way, it should be here next week.

New price on the power supply is about $40k, with the control box and shipping it is all coming to about $1200.

Strapped down and ready to go:


Discussions