helgeWhile I don't have such a posh lens, you might enjoy "DIY Photolithography using 1980s Carl Zeiss S-Planar Lens (405nm)" by Huygens Optics in the meantime:
DIY Step&Scan photolithography
A project log for Step-and-Scan Digital Microlithography
submicron-scale patterning of silicon and dielectrics
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