Kind of got sidetracked on the vacuum system. I got another one!

Some more pics of the new system. This system came from a company called SITe, it was a spinoff company from Tektronix that made top of the line scientific grade CCDs. The Imaging Spectrograph in the Hubble uses one of their CCDs. http://www.stsci.edu/hst/stis/design/detectors/

About 11 years ago the company went under and everything went into storage. One of the items was this coater still bearing old tektronix tags. They finally had no money to store it any longer so it is all being disposed of and I got this guy.

20" Base plate with water cooled stainless bell jar and has a motor drive for planetaries inside. There are three planetaries for 4" wafers and one for 6". It uses a 6" Varian diffusion pump with a water and LN2 cooled cold trap and a VAT gate valve on top of that. The whole thing was originally made by Veeco and either was made with parts from CHA or heavily modified over the year with CHA parts. The jar, lifter, and some of the controls were all made by them.

Inside is the evaporator boats, currently set up for aluminum, copper, and gold, the shutter, and substrate heaters. The boats are heated from a transformer with pneumatic switching that goes up to 500 amps and regulated by a variac. Another variac controls the substrate heater lamps (500w, 120v quartz lamps)

It has a Cooke ion guage controller and a old Veeco thermocouple gauge controller.

For film control it has an old Airco Temescal FDC-8000. A lot of this stuff will be replaced with some newer units I have lying around.

Looking up in the bell jar. The little hole in the center is where the crystal thickness monitor is.

These are the evaporator boats. Aluminum on the left, copper in the center, and gold on the right.